
High-Efficiency Cleaning Agent HEC-831C Series
Clean Graphite Boat
- Reduces 40%+ HF consumption, reduces chemical cost;
- Shortens boat cleaning time;
Clean Rework Wafers
- Easy to remove the “Rainbow and Gold” films on rework wafers;
- Reduces 35%-40% HF and HCl consumption;
- Reduces the cleaning time and increases the production throughput.
Download
High-Efficiency Cleaning Agent HEC.pdf
Process Flow
After Etching before Coating
