High-Efficiency Cleaning Agent HEC-831C Series

High-Efficiency Cleaning Agent HEC-831C Series

Clean Graphite Boat

  • Reduces 40%+ HF consumption, reduces chemical cost;
  • Shortens boat cleaning time;

Clean Rework Wafers

  • Easy to remove the “Rainbow and Gold” films on rework wafers;
  • Reduces 35%-40% HF and HCl consumption;
  • Reduces the cleaning time and increases the production throughput.

Download

High-Efficiency Cleaning Agent HEC.pdf

Process Flow
After Etching before Coating